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2024 03 v.35 374-383
双端面无研合量块干涉测量的研究进展
基金项目(Foundation): 国家市场监督管理总局科技计划项目(No.2022MK220); 国家重点研发计划项目(No.2023YFF0616203)
邮箱(Email): zhangbaowu@126.com;
DOI:
中文作者单位:

中国计量大学计量测试与仪器学院;中国计量科学研究院;

摘要(Abstract):

目的:量块是一种端面长度标准,处于长度量值传递与溯源的关键位置。由于研合层的存在,现行单端面研合式量块干涉仪测量精度的提高受到了限制。为此,量块测量的技术革新开始向着双端面无研合方式迈进。为了跟踪这种新技术的研究动态,分类汇总介绍了其最新的进展。方法:首先介绍了单端面研合式测量方案,阐述了其中的主要问题,然后按照移相法、小数重合法和低相干光源干涉法等三大类综述了双端面无研合测量方案,简述了每种测量方案的实验系统和量块长度解算理论。结果:相比于单端面研合方式,双端面无研合的量块测量技术能够剔除研合层厚度,减少量块磨损,提高量块测量精度,在自动化方面具有突出的优势,但是需要深入研究相位跃变、测量面形貌、干涉光路非同轴,以及干涉光路与量块测量面的非垂直性引起的测量误差。结论:综述结果显示,双端面无研合的量块干涉测量技术已经成为量块测量领域的研究热点,它的成功将极大提升量块计量水平,提高相关领域的测量精度。

关键词(KeyWords): 计量学;量块;干涉仪;无研合;双端面
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基本信息:

DOI:

中图分类号:TB921

引用信息:

[1]张宝武,张旭东,欧阳烨锋.双端面无研合量块干涉测量的研究进展[J].中国计量大学学报,2024,35(03):374-383.

基金信息:

国家市场监督管理总局科技计划项目(No.2022MK220); 国家重点研发计划项目(No.2023YFF0616203)

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