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目的:针对二维单镜面微机电系统(MEMS)振镜在动态扫描中，因镜面几何特性与光路耦合效应产生的复合畸变问题，提出一种基于电压前馈校正的扫描畸变补偿算法。方法:通过构建包含机械偏转、光路传输与空间坐标映射的扫描理论模型，揭示了扫描畸变的形成机制及量化规律。基于非线性优化方法，建立扫描轨迹误差最小化目标函数，通过控制反演电压实现光学畸变的主动预补偿。结果:校正后扫描轨迹的平均绝对误差(MAE)由2.757 7°降至0.724 7°,降幅达74%。结论:该方法无需引入额外光学元件或闭环反馈，为高精度MEMS振镜激光扫描应用提供了有效的开环控制解决方案。
Abstract：Aims: To address the composite distortion caused by the coupling effect between geometric characteristics of monolithic two-dimensional microelectromechanical system(MEMS) mirrors and optical paths in dynamic scanning, this study proposes a scanning distortion compensation algorithm based on voltage feedforward correction. Methods: A theoretical scanning model integrating mechanical deflection, optical transmission, and spatial coordinate mapping was established to elucidate the formation mechanism and quantitative relationships of scanning distortions. Through a nonlinear optimization approach, an objective function minimizing scanning trajectory errors was constructed, achieving active pre-compensation of optical distortions via inverse control voltage derivation. Results: The mean post-correction absolute error(MAE) of scanning trajectories decreased from 2.757 7° to 0.724 7°, representing a 74% reduction in positioning deviation. Conclusions: This open-loop control solution eliminates the need for additional optical components or closed-loop feedback systems, providing an effective approach for high-precision MEMS mirror applications in laser scanning systems.
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基本信息:
DOI：
中图分类号:TH74
引用信息:
[1]毛志翔,徐睿,孙佳烽,等.基于二维单镜面MEMS振镜的扫描畸变分析及电压校正[J].中国计量大学学报,2025,36(02):203-209.
基金信息:
国家重点研发计划项目(No.2023YFE0207700,2023YFF0616203,2024YFF0618000)